Full-Text PDF: MEMS technology moves process spectroscopy into a new dimensionRichard A. CrocombeAxsun Technologies, Inc., 1 Fortune Drive, Billerica, MA 01821, USARate this Article: Select ratingGive MEMS technology moves process spectroscopy into a new dimension 1/5Give MEMS technology moves process spectroscopy into a new dimension 2/5Give MEMS technology moves process spectroscopy into a new dimension 3/5Give MEMS technology moves process spectroscopy into a new dimension 4/5Give MEMS technology moves process spectroscopy into a new dimension 5/5Give MEMS technology moves process spectroscopy into a new dimension 1/5Give MEMS technology moves process spectroscopy into a new dimension 2/5Give MEMS technology moves process spectroscopy into a new dimension 3/5Give MEMS technology moves process spectroscopy into a new dimension 4/5Give MEMS technology moves process spectroscopy into a new dimension 5/5No votes yet Technique: Near Infrared (NIR) Log in or register to post comments